Açıklama:
The present study provide method to construct anovel type of micro-injector system (MIS) for microfliudic delivery insidenanoporous anodic aluminum oxide (AAO) membrane. Now a day’s these micro andnano combined structure gain attention in medical and biological applications.This fabricated micro-nano structure consists of a thin film of anodic aluminumoxide having 50-100μm wider and 12μm deeper channel. A thin Anodic AluminumOxide (AAO) is fabricated by combing Mild anodization in oxalic and Hard anodization(H.A) in sulphuric acid. The dimension and an anisotropic etching wereinvestigated by scanning electron microscopy (SEM). These channels are used forfluid flow on micro scale. These channels are connected with a nozzle likemicrochannel which can perform fluid injection function. This microinjector system is simplymanufactured by embedded microchannel and there is no moving micro part insidenanoporous membrane. Fabrication process is mainly based on photolithographyand wet chemical etching technique. Wetchemical etching takes place in 5 wt% of phosphoric acid solution. Dimensionsand the shape of these microchannels depend solely on anodization and etchingconditions. The presented system can be used into two way: in first way thefluid can be injected through nozzle like channel inside AAO and in second waythe liquid can be purify and filtrate through nanoporous AAO membran. Thisstudy provides a low cost fabricated micro-nano combined structure which couldbe further used in different types of microfluidic devices and enable thedevice to perform the function of injection, filtration and purification.