Alttaş sıcaklığının expanding thermal plazma yöntemi ile elde edilen a-Si:H filmlerin optik ve elektriksel özellikleri üzerine etkisi

dc.creatorGÜNGÖR, Tayyar
dc.creatorADRIAENSSENS, Guy J.
dc.date2011-06-01T00:00:00Z
dc.date.accessioned2019-04-09T07:09:52Z
dc.date.available2019-04-09T07:09:52Z
dc.descriptionOptical properties and dark current activation energy of hydrogenated amorphous silicon (a,Si:H) produced by the expanding thermal plasma chemical vapour deposition (ETPCVD) technique are investigated as a function of substrate temperature in the 150,500°C temperature range. The optical transmission spectra were used to obtain the thickness, refractive index, and optical band gap of the a, Si:H films. It is observed that while the refractive index is increasing with substrate temperature, the optical band gap and deposition rate, as well as the dark conductivity activation energy, are decreasing.
dc.descriptionOptical properties and dark current activation energy of hydrogenated amorphous silicon (a,Si:H) produced by the expanding thermal plasma chemical vapour deposition (ETPCVD) technique are investigated as a function of substrate temperature in the 150,500°C temperature range. The optical transmission spectra were used to obtain the thickness, refractive index, and optical band gap of the a, Si:H films. It is observed that while the refractive index is increasing with substrate temperature, the optical band gap and deposition rate, as well as the dark conductivity activation energy, are decreasing.
dc.formatapplication/pdf
dc.identifierhttp://dergipark.gov.tr/makufebed/issue/19424/206567
dc.identifier
dc.identifier.urihttp://hdl.handle.net/11672/1554
dc.languagetr
dc.publisherMehmet Akif Ersoy University
dc.publisherMehmet Akif Ersoy Üniversitesi
dc.relationhttp://dergipark.gov.tr/download/article-file/181645
dc.sourceVolume: 2, Issue: 1 40-49
dc.source1309-2243
dc.subjectHydrogenated amorphous silicon, solar cell, optical parameters, optical transmittance.
dc.subjectHydrogenated amorphous silicon, solar cell, optical parameters, optical transmittance.
dc.titleAlttaş sıcaklığının expanding thermal plazma yöntemi ile elde edilen a-Si:H filmlerin optik ve elektriksel özellikleri üzerine etkisi
dc.titleEffects of substrate temperature on optical and electrical properties of a-Si:H films produced by expanding thermal plasma thecnique
dc.typeinfo:eu-repo/semantics/article

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